JPH0282033U - - Google Patents
Info
- Publication number
- JPH0282033U JPH0282033U JP16129388U JP16129388U JPH0282033U JP H0282033 U JPH0282033 U JP H0282033U JP 16129388 U JP16129388 U JP 16129388U JP 16129388 U JP16129388 U JP 16129388U JP H0282033 U JPH0282033 U JP H0282033U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holding
- plate
- holding part
- polishing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16129388U JPH0282033U (en]) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16129388U JPH0282033U (en]) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282033U true JPH0282033U (en]) | 1990-06-25 |
Family
ID=31444095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16129388U Pending JPH0282033U (en]) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282033U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS632655A (ja) * | 1986-06-23 | 1988-01-07 | Furukawa Electric Co Ltd:The | ウエハ研磨用プレ−ト |
-
1988
- 1988-12-14 JP JP16129388U patent/JPH0282033U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS632655A (ja) * | 1986-06-23 | 1988-01-07 | Furukawa Electric Co Ltd:The | ウエハ研磨用プレ−ト |